Development of a remote optically actuated and interrogated passive sensor with micro corner cube reflector structure

Luan, Tianshi (2017). Development of a remote optically actuated and interrogated passive sensor with micro corner cube reflector structure. University of Birmingham. Ph.D.

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There is an increasing demand for sensors in extreme environments, i.e. high temperature and radiation environments, where conventional sensors lose their functionality and reliability because of the environmental impact. The dependence on electricity makes conventional sensor susceptible to extreme accident situation and demanding frequent maintenance which could be even more costly in those extreme environments.
To overcome this problem, this thesis reports the development of a remote optically actuated and interrogated resonant sensor with a micro corner cube retroreflector (CCR) structure. The proposed sensor takes the advantage of MEMS scaling to enable optical actuation and remote interrogation. It does not rely on any local electrical power or electric elements therefore it is more resistant to high temperature and radiation impact.
In this thesis, a micro paddle resonant sensor is theoretically shown to be able to get actuated without using electrical power or electric element. The remote actuation with optical method was analytically modelled and simulated. A simple and impact optical interrogation system is designed by combining the micro paddle resonator with a micro CCR structure which allows interrogating light source and detecting photodiode to be placed in the same place utilising the retroreflection of the CCR. The fabrication methods of the paddle mirror and micro CCR sidewalls were demonstrated respectively. Finally, a completed fabrication plan is provided.

Type of Work: Thesis (Doctorates > Ph.D.)
Award Type: Doctorates > Ph.D.
College/Faculty: Colleges (2008 onwards) > College of Engineering & Physical Sciences
School or Department: School of Engineering, Department of Mechanical Engineering
Funders: None/not applicable
Subjects: T Technology > TJ Mechanical engineering and machinery


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