# Applications of perovskite oxide thin films: microcantilevers, superconducting devices and dielectric interconnections

Vasta, Giuseppe (2012). Applications of perovskite oxide thin films: microcantilevers, superconducting devices and dielectric interconnections. University of Birmingham. Ph.D.

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## Abstract

The aim of this Phd is to investigate the properties of micro-cantilevers, containing BaTiO$$_3$$ based capacitors on their top and verify if they can be used as energy harvesting devices. SrRuO$$_3$$/BaTiO$$_3$$ systems behaving as high quality (i.e. with an impedance phase between -80° and -90°) capacitive structures, in the frequency range 6KHz - 50KHz and with a residual polarization equal to 2.5 µC/cm$$^2$$ have been fabricated on 400 nm thick MgO sacrificial layer. These structures allow to design micro-cantilevers with a minimum resonance frequency of 6KHz.
Two piezoelectric modes are generally used in energy harvesting devices, they are the 33 and the 31 piezoelectric mode. X-ray diffraction analysis shows that the polar axis of BaTiO$$_3$$ is perpendicular to the surface of the film when this layer is grown on SrRuO$$_3$$ and SrTiO$$_3$$. This configuration fits the 31 energy harvesting mode. When BaTiO$$_3$$ is grown on MgO the polar axis is parallel to the surface of the film so this configuration fits the33 energy harvesting mode.
Micro-cantilevers employing YBa$$_2$$Cu$$_3$$O$$_7$$ and MgO sacrificial layers have been fabricated with a technology developed for the fabrication of Nb/Au/YBa$$_2$$Cu$$_3$$O$$_7$$ ramp type Josephson junctions.

Type of Work: Thesis (Doctorates > Ph.D.)
Award Type: Doctorates > Ph.D.
Supervisor(s):
Supervisor(s)EmailORCID
Tarte, EdwardUNSPECIFIEDUNSPECIFIED
Licence:
College/Faculty: Colleges (2008 onwards) > College of Engineering & Physical Sciences
School or Department: School of Engineering, Department of Electronic, Electrical and Systems Engineering
Funders: None/not applicable
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TK Electrical engineering. Electronics Nuclear engineering
URI: http://etheses.bham.ac.uk/id/eprint/3217

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