Development of a bio-inspired MEMS based tactile sensor array for an artificial finger

3259 16 19109 6 35846 document 19109 Muhammad12PhD.pdf application/pdf adaf8b8dcab933fbb9173e055b766782 MD5 3894899 2012-04-19 15:23:52 http://etheses.bham.ac.uk//id/eprint/3259/1/Muhammad12PhD.pdf 3259 1 1 application/pdf application/pdf en public

Muhammad12PhD.pdf

http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/19113 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/19113 http://eprints.org/relation/hassmallThumbnailVersion http://etheses.bham.ac.uk/id/document/19113 http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/19114 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/19114 http://eprints.org/relation/haspreviewThumbnailVersion http://etheses.bham.ac.uk/id/document/19114 http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/19115 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/19115 http://eprints.org/relation/hasIndexCodesVersion http://etheses.bham.ac.uk/id/document/19115 19110 4 35849 document 19110 Decl_IS_Muhammad12PhD.pdf application/pdf 55ccabc51bd30c4273f707d3eb75a979 MD5 203339 2012-04-19 15:24:11 http://etheses.bham.ac.uk//id/eprint/3259/2/Decl_IS_Muhammad12PhD.pdf 3259 2 2 application/pdf application/pdf en staffonly

Decl_IS_Muhammad12PhD.pdf

http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/19111 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/19111 http://eprints.org/relation/hassmallThumbnailVersion http://etheses.bham.ac.uk/id/document/19111 http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/19112 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/19112 http://eprints.org/relation/haspreviewThumbnailVersion http://etheses.bham.ac.uk/id/document/19112 19111 2 35858 document 19111 small.png image/png 4608d95fa7ee8905a1bad4d4bd877551 MD5 10378 2012-04-19 15:35:22 http://etheses.bham.ac.uk//id/eprint/3259/3/small.png 3259 3 3 image/png thumbnail_small Thumbnail Documents conversion from application/pdf to thumbnail_small en staffonly

small.png

http://eprints.org/relation/isVersionOf http://etheses.bham.ac.uk/id/document/19110 http://eprints.org/relation/isVolatileVersionOf http://etheses.bham.ac.uk/id/document/19110 http://eprints.org/relation/issmallThumbnailVersionOf http://etheses.bham.ac.uk/id/document/19110 19112 2 35859 document 19112 preview.jpg image/jpeg 44840a5558c113d46ed3477f37f77f94 MD5 43043 2012-04-19 15:35:23 http://etheses.bham.ac.uk//id/eprint/3259/4/preview.jpg 3259 4 4 image/jpeg image/jpeg Thumbnail Documents conversion from application/pdf to thumbnail_preview en staffonly

preview.jpg

http://eprints.org/relation/isVersionOf http://etheses.bham.ac.uk/id/document/19110 http://eprints.org/relation/isVolatileVersionOf http://etheses.bham.ac.uk/id/document/19110 http://eprints.org/relation/ispreviewThumbnailVersionOf http://etheses.bham.ac.uk/id/document/19110 19113 2 35860 document 19113 small.png image/png 2f1824d81ea6c9e5f6705e5b8a4ca33e MD5 3735 2012-04-19 15:35:23 http://etheses.bham.ac.uk//id/eprint/3259/5/small.png 3259 5 5 image/png thumbnail_small Thumbnail Documents conversion from application/pdf to thumbnail_small en staffonly

small.png

preview.jpg

indexcodes.txt

http://eprints.org/relation/isVersionOf http://etheses.bham.ac.uk/id/document/19109 http://eprints.org/relation/isVolatileVersionOf http://etheses.bham.ac.uk/id/document/19109 http://eprints.org/relation/isIndexCodesVersionOf http://etheses.bham.ac.uk/id/document/19109 archive 4031 disk0/00/00/32/59 2012-04-19 15:58:10 2019-01-23 09:55:53 2012-04-19 15:58:10 thesis show 0 Muhammad Haseena Bashir Ward Michael C. L. University of Birmingham Development of a bio-inspired MEMS based tactile sensor array for an artificial finger unpub QH301 QM T1 TJ 10col_ephy In this thesis, the design, fabrication and characterisation of a bio-inspired microelectromechanical systems (MEMS) based tactile sensor array is presented. A vast amount of research has been carried out in the area of tactile sensing and various transduction methods have been explored. However, currently no device exists with a performance comparable to that of the biological tactile sensors of the human fingertip in terms of robustness, sensitivity, spatial resolution and dynamic performance. The sensors developed in this work employ the principles of electrical capacitance and are fabricated from commercially available siliconon- oxide wafers using simple process steps. Each sensor is formed from two plates of highly conductive silicon separated by an air-gap formed from sacrificial etching of the oxide layer. Deflection of the 2 \(\mu\)m thick upper plate of the sensor as a result of applied mechanical stimulus, causes a change in capacitance which is the output of the sensor. Within the array, the individual sensors are spaced 150 \(\mu\)m apart (centre-centre pitch of 570 \(\mu\)m) and therefore offer the potential for high spatial resolution. To protect the sensor array from mechanical shock and provide skin like compliance, the use of suitable packaging materials was explored. The use of poly dimethyl siloxane (PDMS) as a suitable skin-like material was demonstrated. Modification of the surface topography of the packaging layer to include ’fingerprint’ like features was explored and its benefits highlighted. Sensor characterisation experiments revealed that the sensing device was sufficiently sensitive to allow the discrimination of different textures (with feature spacing down to 0.2 mm) through tests conducted using gratings varying in spatial periodicity and fabrics. Based on the results, the sensors can be used as an analogue of the slowly adapting tactile receptors (Merkel disks) for robotic finger applications. 2012-07 2011-12 graduation eng author unchecked This unpublished thesis/dissertation is copyright of the author and/or third parties. The intellectual property rights of the author or third parties in respect of this work are as defined by The Copyright Designs and Patents Act 1988 or as modified by any successor legislation. Any use made of information contained in this thesis/dissertation must be in accordance with that legislation and must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the permission of the copyright holder. public 228 University of Birmingham School of Engineering, Department of Mechanical Engineering d_ph na 2012-07 graduation