Applications of perovskite oxide thin films: microcantilevers, superconducting devices and dielectric interconnections

3217 16 18662 6 34572 document 18662 Vasta12PhD.pdf application/pdf e9b45de26b15f94e3ee94fc033da87c5 MD5 11639194 2012-02-24 15:03:12 http://etheses.bham.ac.uk//id/eprint/3217/1/Vasta12PhD.pdf 3217 1 1 application/pdf application/pdf en public

Vasta12PhD.pdf

http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/18663 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/18663 http://eprints.org/relation/hassmallThumbnailVersion http://etheses.bham.ac.uk/id/document/18663 http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/18664 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/18664 http://eprints.org/relation/haspreviewThumbnailVersion http://etheses.bham.ac.uk/id/document/18664 http://eprints.org/relation/hasVolatileVersion http://etheses.bham.ac.uk/id/document/18665 http://eprints.org/relation/hasVersion http://etheses.bham.ac.uk/id/document/18665 http://eprints.org/relation/hasIndexCodesVersion http://etheses.bham.ac.uk/id/document/18665 18663 2 34575 document 18663 small.png image/png b8603244984049f918dea768848ce19f MD5 4682 2012-02-24 15:03:51 http://etheses.bham.ac.uk//id/eprint/3217/2/small.png 3217 2 2 image/png thumbnail_small Thumbnail Documents conversion from application/pdf to thumbnail_small en staffonly

small.png

preview.jpg

indexcodes.txt

http://eprints.org/relation/isVersionOf http://etheses.bham.ac.uk/id/document/18662 http://eprints.org/relation/isVolatileVersionOf http://etheses.bham.ac.uk/id/document/18662 http://eprints.org/relation/isIndexCodesVersionOf http://etheses.bham.ac.uk/id/document/18662 archive 4031 disk0/00/00/32/17 2012-02-24 09:54:37 2019-01-23 09:55:47 2012-02-24 09:54:37 thesis show 0 Vasta Giuseppe Tarte Edward ftp://ubira.bham.ac.uk/eTheses/3217_Vasta/ University of Birmingham Applications of perovskite oxide thin films: microcantilevers, superconducting devices and dielectric interconnections unpub TJ TK 10col_ephy Work related to this thesis is published as Vasta, Giuseppe and Jackson, Timothy J. and Tarte, Edward (2012) Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications. Thin Solid Films, 520 (7). pp. 3071-3078. http://eprints.bham.ac.uk/1026/ The aim of this Phd is to investigate the properties of micro-cantilevers, containing BaTiO\(_3\) based capacitors on their top and verify if they can be used as energy harvesting devices. SrRuO\(_3\)/BaTiO\(_3\) systems behaving as high quality (i.e. with an impedance phase between -80° and -90°) capacitive structures, in the frequency range 6KHz - 50KHz and with a residual polarization equal to 2.5 µC/cm\(^2\) have been fabricated on 400 nm thick MgO sacrificial layer. These structures allow to design micro-cantilevers with a minimum resonance frequency of 6KHz. Two piezoelectric modes are generally used in energy harvesting devices, they are the 33 and the 31 piezoelectric mode. X-ray diffraction analysis shows that the polar axis of BaTiO\(_3\) is perpendicular to the surface of the film when this layer is grown on SrRuO\(_3\) and SrTiO\(_3\). This configuration fits the 31 energy harvesting mode. When BaTiO\(_3\) is grown on MgO the polar axis is parallel to the surface of the film so this configuration fits the33 energy harvesting mode. Micro-cantilevers employing YBa\(_2\)Cu\(_3\)O\(_7\) and MgO sacrificial layers have been fabricated with a technology developed for the fabrication of Nb/Au/YBa\(_2\)Cu\(_3\)O\(_7\) ramp type Josephson junctions. 2012-07 2011-11 graduation eng author unchecked This unpublished thesis/dissertation is copyright of the author and/or third parties. The intellectual property rights of the author or third parties in respect of this work are as defined by The Copyright Designs and Patents Act 1988 or as modified by any successor legislation. Any use made of information contained in this thesis/dissertation must be in accordance with that legislation and must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the permission of the copyright holder. Giuseppe Vasta public 413 University of Birmingham School of Engineering, Department of Electronic, Electrical and Systems Engineering d_ph na 2012-07 graduation