Novel resist materials for next generation lithography

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http://eprints.org/relation/isVersionOf http://etheses.bham.ac.uk/id/document/3286 http://eprints.org/relation/isVolatileVersionOf http://etheses.bham.ac.uk/id/document/3286 http://eprints.org/relation/isIndexCodesVersionOf http://etheses.bham.ac.uk/id/document/3286 archive 4031 disk0/00/00/13/33 2011-02-17 08:52:09 2019-01-23 09:53:57 2011-02-17 08:52:08 thesis show 0 Manyam Jedsada Robinson Alex P. G. Palmer Richard E. University of Birmingham Novel resist materials for next generation lithography unpub TK QD QC 10col_ephy Fullerene derivatives have been demonstrated as negative-tone resists for electron beam lithography with impressive capability for high resolution and high plasma etching resistance, due to their carbon-rich nature. Their primary drawback of extremely poor sensitivity has been addressed by implementation of chemical amplification. A three-component chemically amplified negative-tone resist has been developed via the addition of a photoacid generator and a crosslinker to a fullerene derivative. This thesis work presents a significant extension of the previous work. The resists have undergone comprehensive optimisation, and systematic characterisation of electron beam lithography behaviours. In the first part, a systematic study into chemical amplification of negative-tone fullerene resists through variation of resist composition, additive, and resist processing in order to optimise sensitivity, resolution, line width roughness and etch resistance is presented. Sensitivity of sub 10 C/cm2 at 20 keV, half pitch resolution of 20 nm, a minimum sparse feature linewidth of 12 nm, line width roughness of sub 5 nm, and high etch resistance comparable with a commercial novolac resist have been demonstrated. The second part presents the development of a chemically amplified positive-tone fullerene based resists with the advantage of aqueous base solution development. Their lithographic capability is evaluated and discussed. 2011-07 2010-10 graduation eng author unchecked This unpublished thesis/dissertation is copyright of the author and/or third parties. The intellectual property rights of the author or third parties in respect of this work are as defined by The Copyright Designs and Patents Act 1988 or as modified by any successor legislation. Any use made of information contained in this thesis/dissertation must be in accordance with that legislation and must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the permission of the copyright holder. Government of Thailand public 144 University of Birmingham School of Physics and Astronomy d_ph epsrc other 2011-07 graduation