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Design and development of MEMS biosensors

Mahmoodi, Nasim (2017)
Ph.D. thesis, University of Birmingham.

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This thesis is focused on design and development of two types of MEMS bio/chemical sensors and the deposition of a thin Au film for functionalization of the sensors with thiol-SAMs.

The effect of Au deposition rate on the morphology and crystallinity of the deposited Au film by thermal evaporation at room temperature on silicon was investigated. Formation of homogenous thiol-SAMs has been shown on the manufactured Au coated samples.

A micro-paddle resonator as a potential mass sensor in a gas environment has been proposed. FIB machining was used to fabricate the prototype device on 500 nm thick LPCVD silicon nitride. The dynamic response of the sensor was investigated over a range of pressure and compared with the simulation results. The sensitivity of the sensor was determined experimentally to be 1.61 fg/Hz. The application of the sensor for detection of Au nanoparticles was shown.

A novel type of hybrid static-dynamic micro sensor for detection in an aqueous medium was studied. This sensor is comprised of a thin membrane and a double-ended-tuning-fork (DETF) structure. The sensitivity of the sensor was numerically determined to be 91 Hz/(mJ/m2). FIB is used to make a high resolution Al2O¬3 mask for fabrication of the DETF structure.

Type of Work:Ph.D. thesis.
Supervisor(s):Anthony, Carl and Pikramenou, Zoe and Mendes, Paula
School/Faculty:Colleges (2008 onwards) > College of Engineering & Physical Sciences
Department:School of Mechanical Engineering
Additional Information:

Publications arising from thesis:

B. AlQattan, H. Butt, A. Sabouri, A.K. Yetisen, R. Ahmed, N. Mahmoodi, “Holographic direct pulsed laser writing of two-dimensional nanostructures”, RSC advances, 2016. 6(112): p. 111269-111275.

Subjects:QH301 Biology
TJ Mechanical engineering and machinery
Institution:University of Birmingham
ID Code:7534
This unpublished thesis/dissertation is copyright of the author and/or third parties. The intellectual property rights of the author or third parties in respect of this work are as defined by The Copyright Designs and Patents Act 1988 or as modified by any successor legislation. Any use made of information contained in this thesis/dissertation must be in accordance with that legislation and must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the permission of the copyright holder.
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