Vasta, Giuseppe (2012)
Ph.D. thesis, University of Birmingham.
The aim of this Phd is to investigate the properties of micro-cantilevers, containing BaTiO\(_3\) based capacitors on their top and verify if they can be used as energy harvesting devices. SrRuO\(_3\)/BaTiO\(_3\) systems behaving as high quality (i.e. with an impedance phase between -80° and -90°) capacitive structures, in the frequency range 6KHz - 50KHz and with a residual polarization equal to 2.5 µC/cm\(^2\) have been fabricated on 400 nm thick MgO sacrificial layer. These structures allow to design micro-cantilevers with a minimum resonance frequency of 6KHz.
|Type of Work:||Ph.D. thesis.|
|School/Faculty:||Colleges (2008 onwards) > College of Engineering & Physical Sciences|
|Department:||School of Electrical Electronic and Computer Engineering|
Work related to this thesis is published as
|Subjects:||TJ Mechanical engineering and machinery|
TK Electrical engineering. Electronics Nuclear engineering
|Institution:||University of Birmingham|
|Copyright Holders:||Giuseppe Vasta|
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